The vacuum furnace system is mainly composed of relevant control equipment, heating system and vacuum system.
The vacuum system consists of diffusion pump
, mechanical pump
, main valve, high vacuum baffle valve and bypass valve. The mechanical pump is a crude vacuum device, and its power source is a three-phase ac motor. High vacuum oil diffusion pump is a high vacuum device. It can complete the air extraction work required by high vacuum degree with the help of diffusion pump oil, front stage mechanical pump and electric furnace heating. It can control the on and off of its electric heating furnace through the disconnection and suction of the ac contactor, so as to control the stop and action of the diffusion pump.
Heating system is composed of heating elements and heating power, heating power choose magnetic voltage regulator, using dc excitation power supply load of non-contact smooth stepless voltage regulation, the dc excitation power supply controlled by power governor, governor using temperature controller and power through the furnace temperature setting of the thermocouple is detected and the difference between the current value of the PID arithmetic, the output of 5 ~ 21 ma dc signal, the control voltage and magnetic full of magnetic voltage regulator, and then according to the set temperature control curve of temperature controller to realize the automatic control of temperature and heating current.
In the design of the distributed control system, make full use of the computer's powerful processing function and data operation, timely monitoring the working state of the system, especially the introduction of intelligent PID parameters automatic tuning, further improve the control index of the vacuum furnace system.