Roots vacuum pump mainly refers to a pair of synchronous, high-speed rotating sole-shaped rotors of the vacuum pump, but for it can not be pumped alone, the front stage or need to be equipped with oil seals, water rings, etc. can be directly discharged into the atmosphere. The pump is equipped with two blade-shaped rotors running synchronously in opposite directions. There are small voids between the rotors, between the rotors and the inner wall of the pump housing, and there is no contact with each other.
It is widely used in vacuum coating, microelectronics, photoelectric semiconductor, solar energy, smelting, packaging and testing, vacuum immersion, plasma cleaning and other industries.
Due to the continuous rotation of the rotor, the exhausted gas is sucked into the cylinder space between the rotor and the pump housing from the intake port, and then discharged through the exhaust port. Since the cylinder block space is completely closed after suction, there is no compression and expansion of gas in the pump chamber. But when the top of the rotor rotates around the edge of the exhaust port and the space of the cylinder block is connected with the exhaust side, due to the high pressure of the exhaust side, a part of the gas rushes back into the space of the cylinder block, resulting in a sudden increase in the pressure of the gas. When the rotor continues to rotate, the gas is discharged out of the pump.