Oil diffusion vacuum pump is a vacuum pump pumped by high-speed and directional flow of oil vapor jet. The oil diffusion pump must be used in conjunction with the front-stage vacuum pump, and must be opened under certain conditions of the front-stage vacuum. The limit vacuum of the oil diffusion pump can reach 10-7 mbar (absolute pressure).
Oil diffusion pump is the main equipment to obtain high vacuum. It is widely used in high vacuum distillation, vacuum smelting, vacuum coating, space simulation test and some vacuum systems which are insensitive to oil pollution.
Oil diffusion vacuum pump Working Principle：
The heater located at the bottom of the oil diffusion pump heats the pump oil at the bottom of the chamber. The vapor of the pump oil is injected into the wall of the cooling pump body at supersonic speed and at a specific angle through an injection system. The vapor of the pump oil is cooled to liquid on the inner wall of the pump body to flow back to the bottom of the cavity in the form of falling film.
Because of the vacuum of the front vacuum pump, the flow of oil vapor in the pump is always maintained in the diffusion pump.
Gas molecules from the high vacuum flange region enter the vapor flow of the diffusion pump, and a driving force is obtained along the direction of the vapor flow of the diffusion pump oil, which produces the effect of a pump.
In the process, gas molecules can diffuse into the pump oil. When the pump oil returns to the evaporation chamber, the pump oil passes through a high temperature zone, also known as the purification zone, so that the light gas molecules are separated from the pump oil and discharged to the primary vacuum pump.
The cap-type diaphragm integrated in the diffusion pump reduces the reverse flow of pump oil, and the diaphragm at the front vacuum interface greatly reduces the consumption of pump oil at high gas flux.
Oil diffusion vacuum pump Technical characteristics:
1. Diffusion pump flange size from DN40 to DN1000
2. Air or water cooling
3. High flow
4. Good pre-vacuum stability
5. Very low gas reflux
6. Continuous self-cleaning function of pump oil in purification zone