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Oil diffusion vacuum pump supplier

Min.Order Quantity: 1 Set/Sets Oil diffusion vacuum pump supplier

Supply Ability: 400~700 Set/Sets per Month Oil diffusion vacuum pump supplier

Payment Terms: L/C,T/T,


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Oil diffusion vacuum pump (hereinafter referred to as diffusion pump) is also the main equipment used to obtain high vacuum or ultra-vacuum. It belongs to jet vacuum pump, which uses the air flow of low pressure and high speed oil vapor as working medium. The working pressure ranges from 10-1 to 10-6 Pa, and the limit vacuum can reach 10-8 Pa. Diffusion pump pumping rate from several liters per second to hundreds of thousands of liters per second. The utility model has the advantages of non-selectivity, simple structure, no mechanical moving parts, convenient operation, low cost, long service life and easy maintenance. Compared with other high vacuum pumps or ultra-high vacuum pumps, oil diffusion pumps have the disadvantage of causing oil vapor pollution, low pumping efficiency and need circulating water cooling. Diffusion pumps are widely used in scanning electron microscopy, early electron beam exposure equipment and ion plating equipment.

 
Oil diffusion pump is mainly composed of pump body, cooling cap, nozzle, steam flow conduit, working medium (pump oil) and heater. With the continuous improvement of the process, the oil diffusion pump is generally made into a multi-stage structure. The pump oil in the oil pan of diffusion pump is heated by the electric furnace wire heater, which makes the pump oil boil and evaporate and produces a large amount of oil vapor. Because the vessel has been pre-vacuum pumped by the front pole pump, the pressure is low, and the pump oil can evaporate at about 200 C. Oil vapor enters the multi-stage umbrella nozzle through the diversion tube to form a high-speed steam flow, and then sprays out rapidly from the umbrella nozzles at all levels. Because of the pressure difference between the exhausted gas near the exhaust port of the diffusion pump and the airflow in the vapor flow, the exhausted gas molecules can easily diffuse into the vapor jet. Oil vapor and pumped gas molecules collide with each other, causing the pumped gas molecules to move at high speed along the direction of the steam jet. Due to the action of vapor flow, the gas is reflected back and forth on the pump wall. After several reflective collisions, the gas molecules are compressed to the low vacuum end and finally pumped away by the front vacuum pump. The working oil vapor is condensed on the cooling pump wall and then returned to the oil pan for re-heating. A steady vapor flow is formed between the nozzle and the pump wall.
 
When the oil diffusion pump is connected to the system, even if the pump oil with low saturated vapor pressure is used and the cold trap is installed at the pump mouth, there is still a part of oil vapor flowing back to the high vacuum end, which pollutes the pumped system. In addition, heating oil vapor consumes large power and has low efficiency (only about 70%). It is difficult to obtain cleaner vacuum without special measures. So at present, most electron beam lithography machines do not use this kind of vacuum pump.

 

Item KT-100 KT-160 KT-200 KT-250 KT-300 KT-320 KT-400 KT-500
Ultimate pressure (Pa) 5×10-5
Pumping Capacity (L/S) 550 1800 2800 3500 4600 5000 8500 12000
Critical fore-pump pressure (Pa) 40
Backflow rate mg/(cm2·min) ≤3×10-2
Heating time ( min) ≤30 ≤35 ≤40 ≤45
Heating Power (kw) 0.8-1 1.4-1.6 1.6-1.8 2.2-2.4 2.4-3 4~5 4~5 6~8
Electric Voltage (AC)V 220 380
Pump Oil Model KS-3
Pump Oil Volume ( L) 0.15 0.45 0.55 1-1.4 1-1.6 1.4-1.8 3~4 4
Cooling water consumption (L/H) 180 250 300 350 400 420 500 600
Inlet dimension (mm) 100 160 200 250 300 320 400 500
Outlet dimension (mm) 32 50 65 65 80 80 100 100
Recommended forepump speed (L/s) 4 8 15 15 30 30 70 150
Dimension
(mm)
L(Length) 320 420 530 473 695 725 885 1010
B(Width) 260 315 390 450 505 525 665 815
H(Height) 365 505 575 650 726 830 925 1165
Net weight (kg) 14 31 39 48 89 100 175 185

 

Item KT-600 KT-630 KT-800 KT-900 KT-1000 KT-1200 KT-1400 KT-1600
Ultimate pressure

 

(Pa)

5×10-5
Pumping Capacity (L/S) 17500 20000 30000 40000 50000 60000 90000 130000
Critical fore-pump pressure

 

(Pa)

40
Backflow rate

 

mg/(cm2·min)

≤3×10-2
Heating time

 

( min)

≤50 ≤60 ≤65 ≤70 ≤80 ≤90
Heating Power

 

(kw)

8~9 9~11 13-13.5 14-16 17-20 28-30 38-40 48-50
Electric Voltage

 

(AC)V

380
Pump Oil Model KS-3
Pump Oil Volume( L) 6~7 7~8 12~14 14-15 15-16 22 38 50
Cooling water consumption

 

(L/H)

800 850 1200 1350 1500 2600 3400 4300
Inlet dimension

 

( mm)

600 630 800 900 1000 1200 1400 1600
Outlet dimension

 

(mm)

150 160 200 200 300 300 320 320
Recommended forepump speed (L/s) 300 600 600 600 1200 1200 1200 2500
Dimension
(mm)
L(Length) 1145 1170 1520 1843 1990 2235 2556 2900
B(Width) 975 1010 1275 1283 1290 1750 1950 2100
H(Height) 1444 1275 1870 1950 2220 2465 2950 3355
Net weight (kg) 375 420 670 830 990 1500 2150 2500

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