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Diffusion Pump for vacuum process systems

Min.Order Quantity: 1 Set/Sets Diffusion Pump for vacuum process systems

Supply Ability: 400~700 Set/Sets per Month Diffusion Pump for vacuum process systems

Payment Terms: L/C,T/T,


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The diffuse vacuum pump structure includes an oil boiler connected to a central multistage injection assembly. The heated oil is ejected from the injection assembly at supersonic speed, and the process gas molecules are entrained in the injection stream and transmitted through the pump body through the momentum of the heavier oil molecules. The process moves the gas molecules from the low pressure inlet flange to the front vacuum port of the diffusion pump, where the oil is condensed and returned to the boiler, and the process gas molecules are removed by the front pump.

 
Diffusion vacuum pump adopts innovative multi-stage injection design, which can achieve maximum stability of pumping operation. This design is especially suitable for high transient pressure, which is usually found in the cavity, without the risk of oil reflux. All diffusive vacuum pumps are designed with long-life heaters, which ensure stable and reliable performance under various operating conditions.

 

Item KT-100 KT-160 KT-200 KT-250 KT-300 KT-320 KT-400 KT-500
Ultimate pressure (Pa) 5×10-5
Pumping Capacity (L/S) 550 1800 2800 3500 4600 5000 8500 12000
Critical fore-pump pressure (Pa) 40
Backflow rate mg/(cm2·min) ≤3×10-2
Heating time ( min) ≤30 ≤35 ≤40 ≤45
Heating Power (kw) 0.8-1 1.4-1.6 1.6-1.8 2.2-2.4 2.4-3 4~5 4~5 6~8
Electric Voltage (AC)V 220 380
Pump Oil Model KS-3
Pump Oil Volume ( L) 0.15 0.45 0.55 1-1.4 1-1.6 1.4-1.8 3~4 4
Cooling water consumption (L/H) 180 250 300 350 400 420 500 600
Inlet dimension (mm) 100 160 200 250 300 320 400 500
Outlet dimension (mm) 32 50 65 65 80 80 100 100
Recommended forepump speed (L/s) 4 8 15 15 30 30 70 150
Dimension
(mm)
L(Length) 320 420 530 473 695 725 885 1010
B(Width) 260 315 390 450 505 525 665 815
H(Height) 365 505 575 650 726 830 925 1165
Net weight (kg) 14 31 39 48 89 100 175 185


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