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turbo molecular pumps performance equivalent to oerlikon leybold pump

Min.Order Quantity: 1 Set/Sets turbo molecular pumps performance equivalent to oerlikon leybold pump

Supply Ability: 400~700 Set/Sets per Month turbo molecular pumps performance equivalent to oerlikon leybold pump

Payment Terms: L/C,T/T,


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 Introduction:

turbo molecular pumps performance equivalent to oerlikon leybold pump can obtain clean and ultra-high vacuum pressure without cold trap and oil baffle. EVP can provide three types of molecular pump with distinguished structure as, hybrid molecular pump, turbo molecular pump, and grease lubricated hybrid molecular pump.
Advantage:
For Compound Molecular Pump
1) High pumping speed and compression ration.
2) Being no critical and with no memory effect to pumped gas.
With clean and high (ultra-high) vacuum without cooling trap and oil flap
Application:
It can be widely used in variant vacuum technology field like photovoltaic, lighting, aerospace, semi-conductor, energy, military, laser, home electrics, material, automobile, etc.

 

Model

unit

FB-600

FB-1200

FB-1600

FB-3600

High vacuum flange

mm

150CF

160

ISO-K

200

CF

200

ISO-K

250

CF

250

ISO-K

400

ISO-K

Fore pipe flange

mm

40 KF

40 KF

50 KF

100 ISO-K

Pumping speed

L/s

600

1200

1600

3600

Compressionration

N2

>109

>109

>109

>108

H2

>8×103

>1×104

>1×104

>5×102

Ultimate pressure

Torr

<8×10-8

<5×10-7

<8×10-8

<5×10-7

<8×10-8

<5×10-7

<2×10-6

Rotary Speed

rpm

24000

24000

24000

13500

Vibration value

µm

0.1

0.1

0.15

0.15

Start-up time

min

<4.5

<5

<6

<11

Fore pump speed

L/s

4-8

8-15

15

30-70

Cooling method

/

Air / water

Air / water

Air / water

water

Ambient temperature(Air)

20

20

20

/

Cooling water

temp.

≤35

≤35

≤35

≤25

consum.

L/m

1-2

1-2

1-2

2

Bake-up temperature

<120

<120

<120

<120

Heater

Power

Kw

<250

<300

<350

/

voltage

V

AC220

AC220

AC220

/

Mounting position

/

Vertical ±5°

Weight

Kg

25

29

31

100


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