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high vacuum turbomolecular vacuum pump for CVD PVD system vacuum measurement

Min.Order Quantity: 1 Set/Sets high vacuum turbomolecular vacuum pump for CVD PVD system vacuum measurement

Supply Ability: 400~700 Set/Sets per Month high vacuum turbomolecular vacuum pump for CVD PVD system vacuum measurement

Payment Terms: L/C,T/T,


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Product description:

The high vacuum turbo molecular vacuum pump unit consists of a turbo molecular pump, a separating exhaust valve of the original mechanical pump, a front pipe, a power and control system of the molecular pump. It is an ultra-high vacuum acquisition device.
 
Features:
 
Easy to install and operate, reliable performance, can be widely used in various fields of surface analysis, accelerator technology, semiconductor equipment, plasma technology, electro-vacuum device manufacturing and vacuum technology.

 

Model unit FB-300 FB-650 FB-1300 FB-2000
High vacuum flange mm 100CF 100ISO 150CF 160

 

ISO-K

200CF 200

 

ISO-K

250CF 250

 

ISO-K

Fore pipe flange mm 25KF 40 KF 40 KF 50 KF
Pumping speed L/s 300 650 1300 1800 / 2000
Compression ration N2 >108 >109 >109 >108
H2 >1×103 >8×103 >1×104 >1×104
Ultimate pressure Torr >3×10-7 >2×10-6 <8×10-8 <5×10-7 <8×10-8 <5×10-8 <8×10-8 <5×10-8
Rotary Speed rpm 30000 24000 24000 24000
Bearing / Grease lubricated ceramic bearing
Start-up time min <4 <5 <5 <5
Fore pump speed L/s 2 4-8 8-15 8-15
Cooling / Air Water Water/air Water/air
Cooling water Temp. / ≤20 ≤20 ≤20
Consum. L/min / 1 1 1
Mounting position / Any Any Any Any
Weight Kg 11 22 27 35

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