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Composite molecular pump

Min.Order Quantity: 1 Set/Sets Composite molecular pump

Supply Ability: 400~700 Set/Sets per Month Composite molecular pump

Payment Terms: L/C,T/T,


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 Molecular pump is a kind of high vacuum acquisition equipment (vacuum up to 10-8pa), which has the advantages of high vacuum, high pumping speed, no oil clean. Molecular pump operation must be in front of the pump operation in high vacuum and special power supply.

 
Application field
 
Widely used in electronic, chemical, ion etching, optical disc manufacturing, semiconductor, solar energy, vacuum furnace, coating, lamps and other industrial enterprises and teaching, scientific research institutions.
 
The performance characteristics of
 
Ultra-high vacuum up to 10-8
 
The pumping speed is up to 3600l/s
 
Long life can be continuous long period of operation
 
A clean vacuum is available
 
High strength material
 
High performance ceramic bearing

Composite molecular pump

Installation size

Composite molecular pump

 

Model unit FB-300 FB-650 FB-1300 FB-2000
High vacuum flange mm 100CF 100ISO 150CF 160

 

ISO-K

200CF 200

 

ISO-K

250CF 250

 

ISO-K

Fore pipe flange mm 25KF 40 KF 40 KF 50 KF
Pumping speed L/s 300 650 1300 1800 / 2000
Compression ration N2 >108 >109 >109 >108
H2 >1×103 >8×103 >1×104 >1×104
Ultimate pressure Torr >3×10-7 >2×10-6 <8×10-8 <5×10-7 <8×10-8 <5×10-8 <8×10-8 <5×10-8
Rotary Speed rpm 30000 24000 24000 24000
Bearing / Grease lubricated ceramic bearing
Start-up time min <4 <5 <5 <5
Fore pump speed L/s 2 4-8 8-15 8-15
Cooling / Air Water Water/air Water/air
Cooling water Temp. / ≤20 ≤20 ≤20
Consum. L/min / 1 1 1
Mounting position / Any Any Any Any
Weight Kg 11 22 27 35

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