vacuum pump is used in the semiconductor manufacturing industry
Vacuum pump, as a main production equipment in semiconductor manufacturing industry, is increasingly required for safety and reliability. When the rotary pump for hydrocarbon oil seals is used for aeration such as photoresist and degumming, explosion sometimes occurs. Atomized oil mist, hot oil vapor, friction, compression, higher temperature, foreign matter, possible static electricity, once combined with oxygen may endanger the environment. And these factors are all in the vacuum pump. The use of nitrogen and other inert gases as gas detonation in the pump and the use of nitrogen to reduce oxygen concentration in the tank (less than 25% oxygen concentration) can reduce the risk of explosion. This method has been adopted by the semiconductor manufacturing industry.
The new vacuum pump will be more suitable for corrosion requirements in IC manufacturing processes, such as ceramic, fusible and precious metals.
The new pump will retain all the advantages of the current pump without the disadvantages of the current pump. In terms of cryogenic pumps, the total reliability of cryogenic generators and compressors will be further improved. In terms of rough pumping, the clearance degree will be increased by at least one order of magnitude. A Japanese electronics company estimates that turbopumps and cryopumps will replace diffusion pumps in the next few years because of their cleanliness. The new type of magnetic bearing turbine molecular pump will be used in the semiconductor manufacturing industry.
The pump will have more computer interfaces or even self diagnosis. Because of the serious chemical corrosion, the self-monitoring impeller pump will replace the piston pump, and the piston pump will become a backward technical representative. After 50 years, many semiconductor manufacturing can even be brought to outer space to carry out! The future vacuum pump will be only a valve behind the processing room for a far-reaching outer space.