vacuum pump in semiconductor manufacturing industry
Vacuum pump as a major production equipment in semiconductor manufacturing industry, more and more safety and reliability are required. Sometimes an explosion occurs when the hydrocarbon oil seal rotary pump is used for lithographic degumming and other aerobic conditions. Atomized oil mist, hot oil vapor, friction, compression, higher temperature, foreign matter, potential static electricity, etc., once combined with oxygen, may harm the environment. And all of these factors are present in the vacuum pump. Using the inert gas such as nitrogen as gas in the pump, and nitrogen to reduce the oxygen concentration of the gas tank (oxygen concentration is lower than 25%), can reduce the risk of explosion. This method has been used by the semiconductor manufacturing industry.
There are many different kinds of vacuum pumps in the semiconductor industry. We divide them into two types: primary pumps and advanced vacuum pumps. The primary pump has several USES: to create an approximate intermediate vacuum (pressure less than 10-3 supports) in the cavity; Empty the area (such as a vacuum lock) of the receiving silicon wafer in a multi-cavity integrated device. The advanced vacuum pump is used to obtain advanced and ultra-high vacuum with pressure range of 10-3 to 10-9 trays. The modern vacuum pumps used in the new chip factory are dry, meaning there is no oil or lubricant inside that could return to the process chamber and contaminate the silicon.
The new pump will maintain all the advantages of the present pump without the disadvantages of the present pump. In cryogenic pump, the total reliability of cryogenic generator and compressor will be further improved. In terms of rough pumping mechanical pump, the clearance will be increased by at least one order of magnitude. A Japanese electronics company estimates that over the next few years, turbopumps and cryogenic pumps will replace diffusion pumps because they are cleaner. A new type of magnetic suspension bearing turbo-molecular pump will be used in the semiconductor manufacturing industry.
The pump will have more computer interfaces and even become self-diagnostic. Due to serious chemical corrosion problems, the impeller pump with self-monitoring capability will replace the piston pump, and the piston pump will become the backward technical representative.