ultra high vacuum systems precautions for selecting pumps
Ultra-high vacuum is mainly used in scientific fields such as surface research, thermonuclear reactions, high-energy accelerators, semiconductor research, and space simulation. At present, the ultra-high vacuum practical vacuum degree can reach 10﹣12Pa.
The ultra-high vacuum system is designed by the user or commissioned by the manufacturer according to the process requirements. It is difficult to buy a complete set of ultra-high vacuum units suitable for the user's requirements. The requirements of pump selection, material selection, valve selection and sealing mechanism of ultra-high vacuum system are strict; the welding process and method are different from the conventional one; the air leakage rate and air leakage rate are required to be lower than the common vacuum system; baking measures are also required when vacuuming.
So what are the precautions when selecting pumps for such an ultra-high vacuum system? How is it more suitable? Let's talk about it briefly today.
For the requirements of vacuum pump used in ultra-high vacuum system, in addition to the usual principle of selecting vacuum pump, there are:
1. The limit vacuum of the main pump is one to one half magnitude higher than that of the vacuum device. If the working vacuum is 1 × 10-6pa, the limit vacuum of the vacuum pump is at least 1 × 10-7pa;
2. Within the working vacuum range of the vacuum device, the vacuum pump shall have enough pumping speed to discharge the gas in the device;
3. The pipes, cold traps, baffles and valves from the inlet of the main pump or the main pump to the exhaust port of the vacuum chamber can be baked at 250-450 ℃;
4. When the main pump has selective pumping for the pumped gas, it shall be equipped with auxiliary pump for combined pumping;
5. The vacuum pump should be made of stainless steel just now.
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