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dry mechanical vacuum pump application and performance

First of all, we should pay attention to the application of dry mechanical vacuum pump in the low-pressure chemical vapor deposition of polysilicon preparation process; in addition, the dry mechanical vacuum pump is also the application of semiconductor etching process. In this case, the abrasive or corrosive process is used.


Moreover, in terms of the application of dry mechanical vacuum pump, in addition to the semiconductor process, some processes that produce particles do not want particles to be mixed into the pump oil, and hope that the particles will be discharged from the pump. In terms of distillation, drying, defoaming and packaging in the chemical industry, pharmaceutical industry or food industry, attention should be paid to prevent organic dissolution It is suitable to use dry vacuum pump.


Then, that is to pay attention to should be to do general oil-free cleaning vacuum system on the front pump, at this time that is to prevent oil pollution.

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Moreover, we should pay attention to the performance comparison of different vacuum pumps. First of all, we should pay attention to the vacuum degree. The limit vacuum degree of dry screw vacuum pump, claw vacuum pump and oil-free scroll vacuum pump is relatively high, and the high limit vacuum will reach 1-2pa. Then, we should pay attention to the oil-free reciprocating vacuum The vacuum pump needs to be matched with low vacuum pump to improve the vacuum limit.


As far as the oil-free scroll vacuum pump is concerned, because of its internal structure problem, the pumping capacity is relatively small, which is only applicable to the process of small pumping capacity; the dry screw vacuum pump has a complete range of models, which is more suitable for the process of large pumping capacity. Next, I, we should pay attention to the fact that it can cooperate with roots vacuum pump in a large scale To a certain extent, it can meet the needs of different kinds of customers.


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