What vacuum pumps are in the vacuum system
Vacuum system is composed of vacuum chamber, vacuum pump or vacuum unit, vacuum pipe, vacuum valve, trap and other vacuum components, electrical control system, etc. It is widely used in electronic semiconductor industry, photoelectric backlight module, mechanical processing and other industries. The vacuum system is usually composed of several vacuum pumps, and plays a role in different fields according to their respective characteristics.
1. Main pump:
The main pump is a vacuum pump which is used to obtain the required vacuum degree to meet the specific technological requirements. According to the different limit pressure required by the vacuum system, the limit pressure of the main pump in the selection process is generally half to one order of magnitude lower than the limit pressure required by the system.
2. Rough pump:
Coarse pumps are vacuum pumps that start at atmospheric pressure and reduce the pressure of the pumped system to the point where the main pump system can start working.
The pressure reached by the crude pump must be less than the starting working pressure of the main pump. The crude pump can also be used as a front stage pump.
3. Front stage pump:
The front stage pump is a vacuum pump to maintain the pre pressure of a pump below its pre critical pressure. The front stage pump can also be used as a crude pump, but it must meet the requirements of pre pumping time and vacuum degree of pre pumping.
At the same time, the front-stage pump is required to meet the pre-vacuum conditions required for the main pump to work; under the maximum allowable exhaust pressure of the main pump, the front-stage pump must discharge the maximum amount of gas discharged by the main pump in time, and the pumping speed of the front-stage pump must be in accordance with the actual pumping speed of the pump at the actual inlet pressure.
4. maintain the pump:
Maintenance pump means that when the volume of gas in the vacuum system is very small, the former pump can not be effectively utilized. For this reason, an auxiliary pump with lower pumping speed is equipped in the vacuum system to maintain the normal operation of the main pump or to maintain the low-pressure vacuum pump required by the exhausted system.