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Vacuum unit classification

The ultra-high vacuum unit with the work above 10-5pa has the diffusion pump, the ultra-high vacuum unit of the molecular pump and the non-oil ultra-high vacuum unit. The unit has the following characteristics:


ultra-high vacuum unit.jpg

1. The ultimate vacuum degree of the main pump is high, which is above 10-7~10-8pa;


2. Can withstand the high temperature of 200 ~ 450 ℃ baking;


3. The partial pressure of main pump reflux gas is very low;


4. For the main pump that is selected by the exhaust gas, it should be equipped with enough auxiliary pump;


5. Vacuum chamber, pipe, valve and other components are required to have low gas discharge rate and low air leakage rate.


一. diffusion pump ultra-high vacuum unit:


  The ultimate vacuum of the ultra high vacuum unit with diffusion pump as the main pump is 10-7~ 10-8pa.


   To reduce the level from diffusion pump the gas diffusion and block mechanical pump oil anti diffusion effect on the ultimate vacuum, but in front of the diffusion pump level type a small pumping speed of diffusion pump, in order to reduce the compression ratio, reduce the diffusion. If a titanium sublimation well is added to the air inlet of the diffusion pump, the nitrogen partial pressure from the diffusion pump can be further reduced, and the ultra-high vacuum of 10-11pa can be obtained.


二. Ultra-high vacuum unit of molecular pump:


  The ultra-high vacuum unit with molecular pump as the main pump has a limit vacuum of 10-8pa, characterized by fast start and low pollution of oil.

Increasing the liquid nitrogen cold trap in the unit can increase the pumping speed. A water cooling trap is provided at the outlet of the mechanical pump to prevent oil vapor from entering the system.


三. No-oil ultra-high vacuum unit:


   The vacuum unit that does not use oil for working fluid and does not have organic material seal is called an oil-free ultra-high vacuum unit. The commonly used main pump has low temperature pump, titanium pump, sputtering ion pump and so on, which can get the ultimate vacuum degree 10-7~ 10-8pa. Compared with an oil vacuum unit, it has the following advantages:

1.Clean vacuum and no pollution source;


2. When the oil-free vacuum pump is started, the pre-pump can be isolated;


3. If the exhaust gas stops suddenly, the system will not be polluted;


4. No oil, no sound, no vibration, improve the working environment;


5. High vacuum degree, large pumping speed and short exhaust time.

vacuum unit .jpg

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