Vacuum System in Semiconductor Factory
As we all know, the size of transistor depends on the level of semiconductor technology. In semiconductor or photoelectric plants, vacuum systems are used to provide vacuum suckers or pens for process equipment to transport wafers or glass, which is a very important support system in semiconductor manufacturing.
In a vacuum system, for the atmosphere, vacuum means that some gases in a particular space or system are discharged, and the pressure in the interior space is less than that in the atmosphere. This space is called vacuum or vacuum. In short, the pressure in the space is lower than that in one atmosphere, which is called vacuum. High vacuum or ultra-high vacuum required in high-tech process must have enough vacuum technology or equipment to achieve.
Vacuum requirement of special vacuum system for semiconductor process is generally between 700-500 mmHg, which only falls within the rough vacuum range. Vacuum requirement of process equipment depends on its application range, but falls within the range of medium vacuum and ultra-high vacuum or above.
Different types of vacuum pumps combined into the system, vacuum degree is also different, about the type of vacuum system, sorted out several categories.
vacuum systems types:
1. Low Vacuum System
2. Medium Vacuum System
(1) A system consisting of a Roots pump connected in series with a mechanical pump;
(2) A system consisting of an oil booster pump connected in series with a mechanical pump;
(3) A system consisting of a Roots pump in series with a small Roots pump and a mechanical pump in series.
3. High Vacuum System
The system consists of a diffusion pump connected with a Roots pump in series and a mechanical pump in series.
(2) A vacuum system consisting of a diffusion pump connected in series with a mechanical pump;
(3) A vacuum system consisting of a diffusion pump connected in series with an oil booster pump and a mechanical pump connected in series.
The above content is the best method to select the application of high vacuum system in semiconductor manufacturing process. High vacuum system can be combined with different vacuum equipment.
In fact, a simple vacuum system can only obtain rough vacuum, and expect high vacuum. Typically, high vacuum pumps in series in vacuum system, such as Roots pump screw pump and high vacuum pump, can be obtained. When connected in series, the high vacuum pump is usually combined with the inlet and outlet valves in the high vacuum pump, and the high vacuum pump keeps the vacuum separately. If a series of high vacuum pumps are oil diffusion pumps to prevent backflow to containers where a large amount of oil vapor is pumped out, trap-water-cooled baffles are usually added to the inlet of the diffusion pump oil. The request can also add a circuit filter, a vacuum gauge head relay, a vacuum hose connecting the inlet of the vacuum pump purge valve, radiator, etc., which constitutes a more complete high vacuum system.