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Oil free Vacuum Pump Application

Clean vacuum environment has always been the ideal vacuum environment pursued by scientists and enterprises. Since the creation of vacuum environment, people have tried to use different means to achieve the effect of clean vacuum. Today, clean vacuum acquisition equipment has developed into condensation pumps, residential pumps, claw pumps, scroll pumps and diaphragm pumps and other products. Among the existing oil-free vacuum pumps, oil-free scroll pumps Compared with other kinds of oil-free vacuum pumps, vacuum pumps have the following characteristics:


1. No oil, no friction - no oil, no contact, no wear, no particulate dust pollution in the vacuum chamber, clean vacuum can be obtained;


2. The pumping capacity is large - double scroll, and the pumping volume of the same diameter pump is twice as large as that of the single stage, which saves energy.


3. High pumping efficiency - with 3-4 pumping units, low pressure difference, O-ring seal between atmosphere and vacuum, low leakage;


4. Non-contact, good balance, small influence of moment, low noise and small vibration;


5. Simple and compact structure, small motion radius and smooth operation under the same size;


6. Small size, easy maintenance and low maintenance cost;


7. Air cooling without water cooling.

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Oil free Vortex Vacuum Pump Application:


1. Semiconductor industry - thin film preparation equipment, semiconductor device packaging equipment;


2. Scientific Instrument Industry - Synchrotron Radiation Beam Line, Electron Microscope, Analytical Testing Instrument;


3. Machinery and equipment industry - material preparation equipment, vacuum testing, material purification equipment;


4. Chemical industry;


5. Medical equipment - dental instruments, dialysis machines, biological products and drug preparation;


6. Packaging industry - food, medicine, biological products and other packaging equipment.




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