Measures to eliminate the backflow of oil vapor in the pumping system of oil diffusion pump
In the application of oil diffusion pump, oil vapor backflow pollution is the main pollution source. Today, I'd like to talk about some measures to eliminate oil vapor backflow in diffusion pump pumping system.
Specific measures include:
1、 Increase the starting power of oil diffusion pump to shorten the pressure transition zone when mechanical pump and oil diffusion pump switch.
2、 By changing the system operation process and using valves to avoid the backflow danger zone (switching transition zone). For example, if a high vacuum valve is opened according to a predetermined speed, gradually open it to ensure that the gas flow into the oil diffusion pump is lower than its maximum displacement, and the pumping speed of the mechanical pump ensures the pressure of the front stage of the oil diffusion pump, so that the diffusion pump can work smoothly, so as to avoid the emergence of the transition zone.
3、 Improve the operation process, adjust the heating power of oil diffusion pump to the best power to avoid the phenomenon of pump oil explosion boiling; generally, the backflow of oil diffusion pump will peak in the process of heating and closing, so the high vacuum valve at the pump port can be used to control to avoid backflow.
4、 The liquid hydrogen cold trap or adsorption trap is installed at the inlet of the oil diffusion pump to capture the backflow oil vapor.
5、 Select high quality oil diffusion pump working fluid.