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High vacuum oil diffusion pump unit

High vacuum oil diffusion pump unit profile:
The high vacuum pumping unit uses the Rots rotary vane unit as pre-pumping. Both the diffusion pump body and the baffle plate are improved, making the pumping speed greater in the lower vacuum area.


High vacuum oil diffusion pump unit


First, the characteristics and use of diffusion pump unit:
 The oil diffusion vacuum pump unit is the main equipment used to obtain high vacuum (10-2 to 10-5Pa). It is composed of oil diffusion pump as the main pump and valve, water-cooled baffle, pipeline, mechanical vacuum pump (pre-stage pump) and other components to form a high-vacuum pumping system. The characteristics of this unit is that the pumping capacity is large and the pumping speed is from 240L/s. It can be selected up to 60,000 L/s; it can work stably for a long time.
It is widely used in electronics, chemical, metallurgy, aerospace, aerospace, materials, biomedicine, atomic energy, cosmic exploration and other high-tech fields. Such as various vacuum furnaces, vacuum coating equipment, vacuum freeze-drying equipment.

Second, the parameters of the diffusion pump unit:

(Pa) Ultimate Pressure10-4
(1/S) Pumping speed100280420900180040006500
(Pa) Max. pumping pressure35
(Kw) Heating power0.811.52.14.88.419.8
Matched main pumpK-100K-150K-200K-300K-400K-630K-800
Matched baffleLB-100LB-150ALB-200BLB-300ALB-400LB-630LB-800
Matched valveGD-100GD-150GD-200GDQ-300GDQ-400GDQ-630GDQ-800
Matched backing pump2X-42X-82X-82X-152X-302X-702X-70 ZJ-600
Connecting flangeLF-100LF-150LF-200LF-300LF-400LF-630LF-800
(mm) Structure dimensionsH87095010001300160020002400
L55065075085095011002000


High vacuum oil diffusion pump unit

High vacuum oil diffusion pump unit


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