High vacuum oil diffusion pump unit
High vacuum oil diffusion pump unit profile:
The high vacuum pumping unit uses the Rots rotary vane unit as pre-pumping. Both the diffusion pump body and the baffle plate are improved, making the pumping speed greater in the lower vacuum area.
First, the characteristics and use of diffusion pump unit:
The oil diffusion vacuum pump unit is the main equipment used to obtain high vacuum (10-2 to 10-5Pa). It is composed of oil diffusion pump as the main pump and valve, water-cooled baffle, pipeline, mechanical vacuum pump (pre-stage pump) and other components to form a high-vacuum pumping system. The characteristics of this unit is that the pumping capacity is large and the pumping speed is from 240L/s. It can be selected up to 60,000 L/s; it can work stably for a long time.
It is widely used in electronics, chemical, metallurgy, aerospace, aerospace, materials, biomedicine, atomic energy, cosmic exploration and other high-tech fields. Such as various vacuum furnaces, vacuum coating equipment, vacuum freeze-drying equipment.
Second, the parameters of the diffusion pump unit:
(Pa) Ultimate Pressure | 10-4 | |||||||
(1/S) Pumping speed | 100 | 280 | 420 | 900 | 1800 | 4000 | 6500 | |
(Pa) Max. pumping pressure | 35 | |||||||
(Kw) Heating power | 0.8 | 1 | 1.5 | 2.1 | 4.8 | 8.4 | 19.8 | |
Matched main pump | K-100 | K-150 | K-200 | K-300 | K-400 | K-630 | K-800 | |
Matched baffle | LB-100 | LB-150A | LB-200B | LB-300A | LB-400 | LB-630 | LB-800 | |
Matched valve | GD-100 | GD-150 | GD-200 | GDQ-300 | GDQ-400 | GDQ-630 | GDQ-800 | |
Matched backing pump | 2X-4 | 2X-8 | 2X-8 | 2X-15 | 2X-30 | 2X-70 | 2X-70 ZJ-600 | |
Connecting flange | LF-100 | LF-150 | LF-200 | LF-300 | LF-400 | LF-630 | LF-800 | |
(mm) Structure dimensions | H | 870 | 950 | 1000 | 1300 | 1600 | 2000 | 2400 |
L | 550 | 650 | 750 | 850 | 950 | 1100 | 2000 |

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