High vacuum oil diffusion pump unit
High vacuum oil diffusion pump unit profile:
The high vacuum pumping unit uses the Rots rotary vane unit as pre-pumping. Both the diffusion pump body and the baffle plate are improved, making the pumping speed greater in the lower vacuum area.
First, the characteristics and use of diffusion pump unit:
The oil diffusion vacuum pump unit is the main equipment used to obtain high vacuum (10-2 to 10-5Pa). It is composed of oil diffusion pump as the main pump and valve, water-cooled baffle, pipeline, mechanical vacuum pump (pre-stage pump) and other components to form a high-vacuum pumping system. The characteristics of this unit is that the pumping capacity is large and the pumping speed is from 240L/s. It can be selected up to 60,000 L/s; it can work stably for a long time.
It is widely used in electronics, chemical, metallurgy, aerospace, aerospace, materials, biomedicine, atomic energy, cosmic exploration and other high-tech fields. Such as various vacuum furnaces, vacuum coating equipment, vacuum freeze-drying equipment.
Second, the parameters of the diffusion pump unit:
|(Pa) Ultimate Pressure||10-4|
|(1/S) Pumping speed||100||280||420||900||1800||4000||6500|
|(Pa) Max. pumping pressure||35|
|(Kw) Heating power||0.8||1||1.5||2.1||4.8||8.4||19.8|
|Matched main pump||K-100||K-150||K-200||K-300||K-400||K-630||K-800|
|Matched backing pump||2X-4||2X-8||2X-8||2X-15||2X-30||2X-70||2X-70 ZJ-600|
|(mm) Structure dimensions||H||870||950||1000||1300||1600||2000||2400|