Dry scroll vacuum pump application
What is a dry scroll vacuum pump:
Dry pump, referred to as dry pump, also known as dry scroll vacuum pump and dry vacuum pump, can work within the pressure range of atmospheric pressure to 10-2Pa. In the pump suction channel (such as the pump chamber), no oil and liquid or exhaust port can be used to communicate with the atmosphere. The pump that can exhaust gas in the atmosphere is called the dry vacuum pump.
dry scroll vacuum pump classification:
The whirl type dry vacuum pump is divided into two types in different ways: one is a vortex fixed (called a static vortex), the other is a Orbiting type that revolves around its rotation without rotation (called a dynamic vortex); the other is a rotary type (Rotat) that rotates around its own axis in the same direction in the same direction (Rotat). Ingtype) its two vortices are all dynamic vortices.
The working principle of the dry scroll vacuum pump:
At present, the revolving type is mostly double chamber horizontal pump, and the rotary type is mostly single cavity vertical pump. Its working principle, the gas from the peripheral inhalation to the central compression by the middle exhaust, to achieve continuous inhalation, compression and exhaust of the entire exhaust process. This pump has a smooth compression and small driving torque, so the vibration is small and the noise is low (60dB (A)). The pressure difference between the two adjacent crescent teeth is small, so the gap leakage is small, and the end face is sealed, and a high compression ratio can be obtained. The pump is pumped from atmospheric pressure to the limit pressure of 1 to 1021Pa and the pump's pumping speed is 20 ~ 50m3/h. It is an energy-saving product. .
Application field of dry scroll vacuum pump:
1. semiconductor industry - film fabrication equipment, semiconductor device packaging equipment;
2. vacuum metallurgy industry vacuum furnace, nano material preparation equipment, vacuum detection equipment;
The 3. instrument industry is synchrotron radiation beamline, electric microscope and analysis instrument.
4. medical equipment -- dental instruments and dialysis machines;
5. products industry -- material purification, drug preparation;
6. packaging industry -- packaging equipment for food, medicine and products.