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Diffusion Pump Fluids

The ideal diffusion pump fluid should be thermally stable, non-volatile, chemically inert and nontoxic. A true diffusion pump fluid, on the other hand, represents a compromise between these characteristics; no fluid can do all of this. We offer a wide range of diffusion pump fluids, including hydrocarbon, polyphenylene oxide and silicone fluids, for a wide range of applications. This choice ensures that we can provide the right fluid for your application.


The importance of correctly selecting the diffusion pump fluid cannot be overemphasized. The benefits of choosing the right fluid include:


Use the most cost-effective fluids for specific applications


Better pumping speed


Reduce maintenance costs


Improve reliability

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Secondary distillation hydrocarbons, such as hfv-a200, perform well in less stringent processes such as decorative coatings, metallization, sputtering, and high gas loading applications. Optical coating, water treatment and other deposition processes require excellent vapor pressure and low reflux characteristics of silicone fluid. This ensures that the fluid does not contaminate the workpieces in the process room. Silicone diffusion pump fluid is very durable, with excellent thermal and chemical stability.


We have identified a series of diffusion pump fluids with lubricity, which can also be used as high-quality mechanical pump fluids. For these applications, 30 lubricants, including 20, are recommended. These diffusion pump fluids perform very well. The benefits of using these diffusion pump fluids in mechanical pumps include:


System cleanliness


Faster pumping cycle


Reduce maintenance requirements


Reduce total downtime


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