Continuous magnetic control coating production line
Continuous magnetic control coating production line can be applied to curtain wall glass, aluminum mirror, mirror production, equipped with rotating cathode, flat cathode magnetron sputtering target. Can on the large plate glass plating system a multitier special metal or metal oxide, metal nitride thin film, metal elemental film, composite membrane, low-e radiation membrane can also be used on little curved glass coating. The production of coating line is high, the coating film is more than 2 million square meters per year, multi-chamber transmission, fully guarantee the uniformity of film layer, physical reason.
Technical configuration of continuous magnetic control coating production line:
1. Cavity structure: the high efficiency horizontal continuous magnetic control coating line is adopted, and the front and back rooms are equipped with the front and back room, and the front and back rooms, the front and rear buffer rooms, and the color plating room.
2. Target material design: new rotating cathode target material and flat cathode target material are adopted.
3. Power configuration: equipped with high power intermediate frequency magnetron sputtering power supply.
4. Transmission system: roller drive, variable frequency adjustable, induction chamber door open system.
5. The vacuum system: diffusion pump, molecular pump, roots pump and mechanical pump + cryogenic pump. Can be coated glass or tablet, the size can be customized, production line adopts the advanced Ann flashboard valve chamber partition, can realize effective partition, stable process gas. The product line adopts uniform inlet pipe structure design, and the air flow injection is uniform and gentle.
6. Electrical control: the production line adopts the whole process control of PLC, fast production beat, and equipped with industrial computer display system.
7. Man-machine dialogue: the control system can realize human and machine dialogue, and make necessary intervention in the production process in a timely manner. The operation process has alarm prompt and fault display, the fault display can prompt the operator to correct operation and troubleshooting.
8. Other technical parameters:
(1) limit vacuum: 3.0 x 10-2pa.
(2) water pressure velocity is greater than 0.2mpa 3m3/h; The water temperature of 25 ℃ or less; Air pressure: 0.4-0.8mpa;
(3) general specification: W1200mm*L2000mm(single room) W1500mm*L2400mm(single room)
Vacuum chamber size or equipment configuration can be customized according to customer products and special process requirements.
Application of continuous magnetic control coating production line:
Continuous coating production line is mainly used in large flat glass, curtain wall glass, low-e glass, low-e glass) continuous bedding face of products such as coating, can be plated metal single-layer film, alloy or metallic compound film. It can be used for large area aluminum lens coating, reflective mirror coating and large area sputtering.